Index for Practical Production of Optical Thin Films

(Taken directly from the Index of the Book.)

abrasion, 81, 112, 117, 118, 131, 137, 141, 142, 143, 145, 154, 163, 187
absentee, 94, 355
absorbing, 83, 109, 118, 131, 134, 139, 142, 143, 145, 180, 194, 198, 199, 345, 346, 357, 389, 393
absorptance, 111, 151, 250
absorption, 58, 59, 60, 61, 81, 84, 87, 92, 93, 94, 95, 96, 106, 107, 108, 110, 111, 112, 118, 120, 121, 123, 126, 127, 128, 129, 130, 131, 132, 134, 137, 138, 139, 141, 142, 144, 145, 147, 148, 150, 151, 154, 161, 162, 166, 172, 178, 180, 203, 204, 206, 220, 231, 237, 274, 291, 312, 316, 346, 356, 358
Absorption, 193, 201
accuracy, 82, 83, 250, 262, 266, 269, 273, 275, 279, 315, 317, 318, 342, 368, 395
accurate, 45, 81, 82, 93, 199, 257, 261, 262, 272, 277, 310, 317, 342, 374, 378, 387
achromatic, 355
Achromatic, 355
activated, 18, 19, 28, 45, 110, 136, 153, 183, 186, 188, 195, 368
Activated, 76, 186, 212
activated reactive evaporation, 195
adatom, 103, 105, 174
adhesion, 7, 31, 104, 107, 108, 112, 114, 118, 120, 128, 129, 136, 137, 142, 145, 146, 149, 150, 154, 163, 183, 219, 238, 242, 243, 246, 316, 355
Adhesion, 208
admittance, 274, 289, 326, 339
admittance diagram, 274
advanced plasma source, 29
Advanced plasma source, 30
al, 29, 34, 35, 37, 47, 57, 58, 82, 88, 89, 90, 91, 99, 103, 105, 107, 108, 109, 110, 111, 112, 113, 114, 115, 117, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 160, 161, 177, 184, 185, 186, 187, 188, 214, 225, 265, 267, 268, 275, 276, 277, 281, 304, 309, 310, 316, 322, 323, 340, 341, 342, 343, 345, 392
Al, 68, 131, 143, 147, 148, 149, 153, 185, 191, 194, 196, 208, 209, 275, 340
Al2O3, 41, 42, 46, 47, 68, 76, 77, 79, 111, 113, 124, 140, 148, 149, 153, 158, 185, 186, 193, 194, 196, 206, 214
AlF3, 141, 158
AlN, 42, 140, 206
alumina, 134, 140, 149, 153, 192, 205
Alumina, 22, 140
aluminizing, 225, 226, 227, 273
Aluminizing, 227
aluminum, 21, 39, 40, 41, 45, 52, 53, 59, 63, 70, 79, 107, 135, 137, 138, 140, 143, 145, 146, 147, 148, 151, 153, 158, 161, 168, 170, 184, 185, 186, 194, 195, 196, 197, 206, 208, 209, 223, 224, 225, 226, 227, 231, 238, 243, 258, 259, 260, 277, 278
Aluminum, 40, 75, 78, 79, 139, 140, 141, 143, 147, 148, 158, 194, 196, 206, 207, 210, 248, 258, 283, 397
Aluminum Fluoride, 141
aluminum nitride, 206
Aluminum Nitride, 140
aluminum oxide, 41, 79, 107, 143, 145, 194
Aluminum Oxide, 78, 79, 140, 196, 248
ambient, 60, 127, 128, 129, 131, 132, 140, 141, 151, 171, 190, 225, 315
amorphous, 105, 110, 123, 130, 138, 149, 153, 154, 156, 187, 196, 214
Amorphous, 47, 196, 214
analysis, 108, 124, 125, 126, 129, 131, 201, 204, 233, 268, 269, 272, 274, 275, 276, 281, 300, 309, 341, 350, 393
Analysis, 203, 206, 396
angle of incidence, 38, 87, 89, 274, 277, 344
angular, 27, 49, 54, 59, 107, 115, 283, 315, 362, 369
Angular, 204
anisotropic, 207
Anisotropic, 207
annealing, 104, 142, 152, 153, 157, 188, 199
Annealing, 195, 205
anode, 25, 26, 28, 29, 30, 31, 34, 37, 76, 161, 163, 164, 165, 166, 170, 171
Anode, 76, 77
antireflection coating, 75, 117, 127, 201, 205, 215, 260, 361, 392, 397
Antireflection coating, 190, 197, 200
application, 1, 24, 28, 30, 37, 38, 40, 57, 58, 60, 64, 68, 88, 120, 134, 138, 140, 147, 148, 149, 150, 152, 153, 154, 155, 156, 157, 158, 184, 186, 187, 188, 204, 209, 222, 250, 263, 270, 272, 273, 277, 279, 291, 304, 307, 309, 312, 320, 322, 325, 337, 362, 382, 393
approximate, 54, 109, 158, 226, 251, 310, 311, 312, 320
Approximate, 311
approximation, 56, 60, 66, 269, 272, 319
APS, 29, 30, 105, 178
AR, 35, 68, 89, 105, 110, 112, 113, 114, 120, 128, 129, 141, 144, 149, 153, 185, 187, 190, 192, 198, 215, 251, 261, 263, 271, 273, 278, 289, 290, 298, 299, 310, 312, 319, 325, 326, 327, 328, 331, 333, 342, 359, 361, 365, 367, 376, 377, 378, 381, 388, 389, 391, 392
arc, 28, 33, 41, 46, 47, 63, 76, 104, 140, 162, 188, 214
Arc, 47, 73, 74
arc evaporation, 188, 214
argon, 18, 20, 28, 42, 70, 103, 104, 118, 128, 131, 134, 137, 138, 145, 160, 165, 166, 168, 169, 171, 172, 173, 181, 182, 216, 231, 255
Argon, 33, 126
arrival rate, 105, 140, 171
atmosphere, 8, 13, 17, 45, 84, 128, 142, 145, 315
atmospheric pressure, 8, 186
atom, 6, 7, 25, 102, 103, 104, 121, 152, 157, 179, 180, 181, 182, 250, 257
atomic, 28, 33, 109, 123, 128, 148, 151, 153, 182, 188, 209, 250, 257, 275, 396
Atomic, 211, 212, 257
attachment, 87, 88, 89, 90, 91
Au, 147, 150, 194
automated control, 63, 346
automated system, 9, 18, 63, 67, 343, 345, 369
automatic, 62, 67, 270, 319, 342, 343, 344, 395
Automatic, 78
automatic control, 342
automation, 28, 62, 63, 267, 358, 369, 370, 390
Automation, 369, 391, 392
B
backfill, 62, 138
backstream, 18
BaF2, 128, 144, 158, 193, 204
baffle, 17, 22, 35, 65
bake, 134
baking, 127, 139
ballast, 13, 17
bandpass, 75, 108, 139, 200, 215, 252, 253, 263, 264, 280, 290, 298, 394
Bandpass, 280, 358, 392, 394
bandpass filter, 75, 108, 139, 200, 215, 252, 253, 290, 298, 394
barium fluoride, 193
Barium Fluoride, 144, 193
barrier, 23, 48, 111, 117, 120, 129, 136, 137, 152, 153, 184, 186, 205
Barrier, 73, 196, 207, 208, 211, 215, 248
barrier properties, 184
base, 8, 59, 60, 103, 147, 151, 170, 194, 202, 207, 219, 236
Base, 197
base pressure, 103, 219
beam, 2, 4, 20, 23, 24, 25, 26, 27, 28, 29, 38, 39, 48, 65, 72, 76, 82, 83, 84, 85, 86, 87, 88, 89, 90, 102, 105, 109, 110, 111, 115, 117, 118, 119, 120, 123, 127, 128, 129, 130, 132, 133, 135, 136, 137, 138, 139, 140, 142, 144, 147, 148, 150, 152, 153, 156, 160, 161, 162, 163, 164, 165, 166, 170, 174, 180, 184, 188, 190, 192, 200, 201, 204, 205, 212, 213, 214, 215, 216, 219, 232, 252, 270, 272, 273, 274, 275, 277, 278, 281, 283, 310, 311, 312, 314, 319, 339, 362, 368, 390, 391, 394, 395, 397
Beam, 23, 37, 86, 195, 198, 200, 204, 206, 207, 210, 216, 368
beamsplitter, 85, 86, 146, 254, 255, 271, 359, 360
beam-splitter, 252
Beamsplitter, 359
bias, 28, 30, 161, 213
Bias, 205
black, 88, 128, 194, 195
blackbody, 59
blocker, 150
blocking, 126, 152, 266, 327, 331, 334, 372, 377, 379, 381, 382, 384, 387, 397
blower, 15, 16, 17
BN, 155, 156, 157, 212, 213, 277
boats, 22, 23, 117, 122, 130, 131, 133, 134, 135, 138, 139, 141, 142, 143, 144, 147, 148, 150, 155
bombardment, 1, 28, 106, 126, 140, 156, 190, 205
boron nitride, 150, 155, 156, 212, 213, 393
Boron Nitride, 155
boron phosphide, 112
BP, 112, 280, 291, 293, 297, 382
Brewster angle, 188
broad band, 130, 251, 252, 254, 267, 268, 271, 272, 290, 293, 294, 297, 298, 310, 326, 367, 389
broad beam, 65, 160, 180, 272
broadband, 75, 128, 185, 256, 260, 267, 270, 271, 274, 291, 309, 310, 361, 392, 395
Broadband, 190, 215, 258, 260, 361, 395
bulk properties, 129, 144
bypass, 15, 232
C
CaF2, 103, 111, 136, 137, 143, 144, 158, 185, 193, 199, 203
Calcium Fluoride, 143, 193
calotte, 49, 51, 52, 54, 55, 56, 57, 59, 60, 64, 69, 118, 119, 165, 219, 251, 270, 283, 315, 344, 358, 367, 368
carbon, 24, 88, 112, 134, 136, 186, 187, 197, 214, 261
Carbon, 47, 187, 197, 198, 214
cathode, 7, 25, 26, 28, 29, 31, 32, 33, 34, 35, 37, 42, 45, 47, 162, 163, 164, 165, 173, 175, 184, 205, 215
Cathode, 40, 78, 160, 161, 162, 163, 164, 165, 166, 171, 178, 211
cathodic, 46, 47
Cathodic, 31, 74
cavity, 12, 23, 161, 162, 280, 285, 286, 290, 300, 302, 377, 378, 381, 383, 384, 386, 387
CeF3, 142, 158
CeO2, 105, 129, 141, 142, 146, 158, 192, 193, 204
Cerium Dioxide, 192, 193
Cerium Fluoride, 142, 193
cerium oxide, 207
Cerium Oxide, 141
chamber, 2, 3, 4, 8, 9, 10, 12, 13, 14, 15, 16, 18, 19, 20, 21, 22, 26, 28, 29, 30, 31, 32, 38, 41, 42, 45, 48, 49, 50, 51, 54, 55, 56, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 69, 115, 117, 118, 119, 121, 122, 126, 127, 130, 132, 134, 140, 148, 158, 160, 161, 162, 163, 164, 165, 166, 168, 170, 171, 172, 173, 174, 175, 176, 177, 183, 219, 223, 225, 227, 229, 232, 234, 238, 241, 242, 256, 257, 258, 259, 260, 261, 264, 275, 276, 278, 279, 315, 316, 317, 325, 339, 343, 368, 369
Chamber, 27, 69
chamber pressure, 8, 14, 29, 30, 41, 42, 54, 55, 118, 119, 122, 160, 162, 163, 164, 165, 168, 171, 172, 225, 227, 234, 238, 242, 256, 316, 368
characteristic, 45, 54
characterize, 339
charge, 22, 26, 27, 32, 47, 122, 123, 128, 166, 223, 225, 226, 227, 251, 257, 260, 261, 278, 389
Charge, 33, 258
chemical vapor deposition, 117, 120, 196, 256, 275, 393
chip, 66, 115, 251, 264, 267, 283, 310, 311, 312, 315, 317, 320, 322, 323, 324, 325, 333, 339, 342, 344, 359, 362, 365, 368, 389
Chip, 310, 326
chromium, 107, 147, 150, 194
Chromium, 146, 147, 194
circle diagram, 300, 319, 327, 347, 351, 354
Circle diagram, 301
clean, 10, 26, 59, 65, 162
closed loop control, 152
cluster, 149
coating design, 91, 114, 271, 278, 341, 361, 392, 397
cohesion, 243, 244
collimated beam, 38, 160
collision, 4, 6
columnar structure, 107, 128, 141
compensation, 267, 269, 271, 279, 280, 281, 282, 283, 285, 290, 300, 303, 304, 305, 307, 308, 309, 310, 333, 337, 361, 362, 367, 388, 389, 391, 393, 395
Compensation, 279, 303, 308, 309, 394
compressive stress, 28, 107, 108, 111, 132, 133, 139, 147, 156, 184, 213
computer, 1, 4, 63, 64, 92, 103, 199, 271, 307, 309, 310, 317, 319, 338, 359, 374, 378, 394
Computer, 319, 369
conclusion, 109, 131, 184, 254, 271
conclusions, 109, 132, 137, 184, 236, 270, 271, 304, 322, 347
condensation, 13, 60, 133
Condensation, 191
condense, 2, 4, 13, 14, 31, 104, 134, 283
conductance, 17, 19, 35
conduction, 23
Conduction, 58
conductive, 22, 143, 152, 153, 195, 212
Conductive, 78, 195, 208, 210, 211, 212
conductivity, 24, 27, 110, 147, 151, 152, 155, 283
constrained optimization, 326, 329
Constrained optimization, 392
constraint, 330, 331
constraints, 64, 121, 276, 326, 327, 329
contamination, 7, 13, 19, 65, 132, 147, 225
Contamination, 109
control, iii, 4, 9, 18, 41, 42, 43, 44, 45, 46, 54, 60, 61, 62, 63, 64, 65, 66, 67, 68, 82, 83, 101, 102, 107, 115, 117, 134, 149, 152, 155, 160, 164, 165, 168, 171, 184, 222, 224, 225, 241, 249, 250, 251, 252, 254, 255, 256, 257, 260, 261, 262, 265, 267, 270, 272, 273, 275, 277, 279, 282, 309, 314, 316, 317, 319, 320, 326, 331, 337, 338, 342, 343, 345, 346, 359, 361, 367, 369, 370, 372, 373, 374, 378, 387, 389, 393, 395, 396, 397
Control, 41, 58, 60, 62, 77, 78, 79, 101, 195, 200, 211, 222, 224, 249, 279, 379, 381, 391, 393, 396, 397
control system, 9, 45, 63, 64, 67, 152, 165, 261, 271, 277, 279, 319, 342, 343
conventional evaporation, 38, 129, 146, 209, 216
copper, 23, 24, 26, 40, 149, 207
Copper, 194
counterintuitive, 128, 298
coupler, 288, 302, 319, 376, 377, 381, 387, 388
Cr, 21, 147, 149, 151, 158
critical, 42, 54, 60, 61, 64, 82, 105, 108, 110, 111, 115, 129, 139, 141, 146, 156, 220, 244, 252, 255, 275, 282, 286, 287, 300, 302, 307, 316, 320, 322, 325, 326, 345, 369, 387
cross-over, 9, 10
cross-over pressure, 9, 10
crucible, 23, 24, 25, 26, 27, 54, 110, 121, 122, 126, 134, 136, 139, 143, 153, 170, 219
cryolite, 191
Cryolite, 141
crystal, 4, 60, 63, 66, 67, 70, 115, 117, 123, 127, 133, 147, 155, 156, 157, 201, 223, 232, 242, 243, 244, 251, 261, 262, 263, 271, 272, 278, 279, 288, 290, 294, 314, 315, 317, 318, 319, 333, 334, 362, 364, 365, 373, 379, 389
Crystal, 60, 63, 64, 190, 212, 261, 262, 317, 362, 396
crystal control, 66, 271
crystal error, 279
crystal monitoring, 67, 251, 262, 279, 317, 364
Crystal monitoring, 362
crystalline, 87, 110, 123, 124, 130, 153, 156, 184, 192, 193, 206
Crystalline, 192, 205, 214
cu, 109, 158, 261
Cu, 147, 194, 212
cube, 13, 232, 348
current control, 164, 165
cutoff, 139, 150, 254
CVD, 1, 21, 48, 73, 101, 106, 156, 185, 186, 197, 256, 257
D
damage, 22, 34, 70, 106, 109, 110, 111, 112, 115, 118, 119, 123, 126, 127, 128, 129, 132, 139, 142, 144, 149, 160, 161, 162, 163, 166, 172, 180, 185, 192, 200, 201, 202, 203, 215, 216
Damage, 109, 191, 201, 215
damage properties, 109, 201
db, 382, 383, 384, 385, 386
dB, 83, 298, 299, 300, 301, 305, 306, 307
dc, 188, 193, 198, 212
DC, 25, 31, 32, 33, 34, 40, 42, 45, 46, 47, 73, 78, 79, 109, 143, 152, 153, 155, 163, 186, 203, 206, 208, 210, 211, 395
DC sputtering, 32, 34
defect, 109, 110, 112, 201
delta, 273
Demchishin, 105
dense, 28, 50, 58, 103, 104, 106, 108, 110, 123, 139, 144, 145, 181, 255, 386, 394
Dense, 75, 285
densification, 29, 127, 138, 144, 165, 171, 179, 180, 181, 182
densify, 102, 104, 157
density, 39, 40, 50, 52, 58, 103, 106, 109, 110, 111, 114, 123, 126, 127, 128, 129, 130, 131, 133, 136, 140, 141, 144, 147, 151, 152, 161, 165, 180, 184, 188, 201, 207, 220, 255, 261, 272, 387
Density, 75, 207
deposition, 22, 25, 28, 31, 32, 33, 34, 37, 38, 39, 41, 42, 45, 47, 48, 49, 58, 62, 63, 74, 75, 76, 78, 79, 103, 104, 105, 106, 107, 108, 110, 112, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 130, 132, 135, 136, 137, 138, 143, 144, 145, 146, 147, 149, 150, 151, 152, 153, 155, 156, 158, 160, 163, 171, 174, 178, 180, 181, 183, 184, 185, 186, 187, 188, 189, 190, 191, 192, 194, 195, 196, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 212, 213, 214, 215, 216, 219, 225, 226, 227, 231, 232, 234, 242, 243, 244, 245, 250, 252, 254, 255, 256, 258, 261, 262, 263, 264, 265, 268, 269, 270, 271, 272, 274, 275, 280, 281, 283, 284, 288, 290, 291, 298, 307, 314, 315, 316, 317, 319, 320, 321, 326, 327, 331, 339, 346, 361, 367, 369, 373, 378, 389, 391, 393, 394, 395, 396, 397
deposition rate, 22, 32, 33, 38, 41, 42, 45, 47, 58, 103, 105, 106, 121, 124, 125, 126, 127, 132, 136, 143, 144, 147, 152, 160, 181, 187, 199, 219, 225, 226, 227, 232, 234, 242, 243, 244, 245, 254, 255, 262, 270, 288, 314, 317, 319, 367, 369, 389
deposition techniques, 114
design, iii, 1, 15, 19, 40, 64, 77, 81, 89, 91, 98, 99, 101, 102, 103, 111, 112, 114, 127, 130, 139, 147, 150, 153, 154, 161, 168, 190, 220, 228, 229, 232, 238, 249, 256, 266, 268, 269, 271, 274, 278, 279, 280, 282, 286, 288, 289, 290, 291, 292, 293, 294, 296, 297, 298, 302, 303, 312, 317, 320, 322, 325, 326, 327, 328, 329, 330, 331, 332, 333, 334, 337, 339, 342, 343, 347, 348, 350, 353, 358, 359, 361, 362, 363, 364, 365, 367, 371, 372, 373, 374, 376, 377, 378, 379, 380, 381, 382, 383, 384, 387, 388, 392
designing, 250, 342
desirable properties, 115, 117, 139
desorption, 179
detector, 66, 82, 83, 84, 87, 89, 264, 274, 276, 312, 319, 339, 368, 393
diagram, 147, 150, 151, 223, 224, 225, 292, 300, 301, 302, 319, 320, 321, 322, 323, 324, 325, 327, 329, 347, 349, 354, 356, 357, 389, 392
Diagram, 223, 224, 292
diamond, 108, 110, 112, 155, 156, 157, 186, 187, 188, 198, 202, 213, 214, 261
Diamond, 47, 187, 188, 197, 198, 212, 213, 214
DIBS, 39, 41, 119, 120, 139, 188, 389
dichroic, 184
dielectric, 34, 45, 76, 91, 114, 129, 147, 149, 150, 191, 192, 198, 199, 200, 201, 216, 238, 251, 273, 276, 391, 394, 395
Dielectric, 75, 78, 191, 193, 195, 198, 206, 208, 396
diffusion pump, 2, 4, 8, 9, 13, 14, 15, 17, 68
diode, 31, 32, 120, 187
Diode, 31, 33
diode sputtering, 32, 120
dip coating, 256
direct monitoring, 251, 252, 283, 312, 359, 367
Direct monitoring, 251
disappearing anode, 34, 76
discharge, 2, 4, 26, 30, 31, 41, 45, 48, 65, 132, 133, 149, 164, 179, 183, 186, 187, 238, 240, 246, 247
Discharge, 183, 208
dispersion, 81, 93, 94, 96, 109, 251, 256, 269, 271, 277, 316, 393
Dispersion, 96
distribution, 4, 25, 27, 33, 49, 50, 54, 55, 58, 59, 69, 70, 71, 115, 116, 119, 160, 163, 170, 220, 283, 284, 290, 305, 313, 315, 363, 369
Distribution, 200
DLC, 47, 101, 112, 187, 188, 214
DOE, 124, 125, 172, 216, 220, 222, 223, 226, 228, 229, 231, 232, 236, 238, 241, 242, 243, 244, 246, 248, 348, 350
double beam, 82, 83, 270, 319, 339, 368
DP, 9, 13, 14, 15, 16, 17, 19, 65
drift, 82, 83, 241, 307, 319
Drift, 307
drive current, 161, 162, 163, 164, 166, 167, 168, 169, 170, 171, 172, 174, 175, 176, 177, 219
drive voltage, 28, 126, 127, 161, 162, 163, 168, 170, 171, 172, 174, 180
Drive voltage, 169, 171, 172, 173, 174, 175, 176, 177
dual, 39, 40, 45, 117, 120, 127, 140, 143, 152, 156, 213, 214, 215, 281
Dual, 34, 66, 76, 77, 78, 196, 270
durability, 12, 58, 81, 114, 127, 132, 135, 137, 141, 142, 144, 149, 150, 160, 189, 194, 199, 201, 205, 207, 279
Durability, 81
durability properties, 135
DUV, 204
DWDM, 38, 39, 83, 117, 119, 139, 252, 271, 281, 285, 286, 287, 289, 290, 298, 299, 300, 303, 304, 306, 307, 310, 319, 320, 370, 394
DWDM filter, 38, 83, 119, 139, 252, 271, 285, 286, 287, 289, 298, 299, 300, 303, 304, 306, 307, 319, 320
E
e-beam, 72
E-beam, 24, 25, 26, 48, 105, 110, 115, 118, 120, 123, 129, 130, 137, 140, 148, 151, 153, 170, 190, 200
ECR, 101, 186, 187, 197
edge, 24, 26, 27, 55, 56, 57, 120, 126, 135, 142, 144, 244, 254, 261, 266, 282, 308, 309, 310, 322, 323, 326, 327, 331, 333, 334, 337, 338, 342, 345, 346, 347, 348, 350, 351, 352, 353, 355, 372, 389, 392
Edge, 207, 308, 346, 392
edge filter, 254, 261, 266, 282, 308, 309, 310, 322, 326, 331, 333, 338, 342, 345, 347, 355, 389
effect, 26, 27, 30, 42, 47, 49, 55, 58, 59, 82, 85, 86, 88, 105, 106, 111, 112, 117, 133, 143, 149, 150, 162, 168, 169, 179, 180, 187, 195, 202, 220, 224, 225, 232, 252, 254, 255, 256, 258, 263, 275, 281, 298, 300, 302, 305, 306, 309, 311, 312, 315, 316, 317, 337, 346, 347, 351, 355, 357, 358, 361, 367, 368, 375, 388, 389, 395
effective index, 327, 331, 347, 348, 349, 350, 354, 355
e-gun, 63, 117, 284
E-gun, 20, 23, 24, 25, 26, 27, 28, 54, 55, 60, 61, 62, 63, 65, 66, 67, 69, 114, 115, 116, 117, 118, 122, 123, 126, 127, 130, 132, 133, 136, 139, 146, 147, 155, 170, 219, 232, 312
ejection pressure, 13
electric field, 104, 106, 109, 111, 112, 202
electrochromic materials, 121
Electrochromic Materials, 154
electron beam, 2, 4, 20, 23, 24, 25, 48, 102, 115, 117, 129, 132, 133, 135, 137, 138, 139, 140, 142, 144, 147, 148, 150, 170, 184, 232, 278, 283, 362, 391
Electron beam, 28
electron volt, 25, 160, 273
electron-beam, 76, 200, 201, 204
electrons, 20, 23, 25, 26, 27, 29, 32, 33, 37, 104, 116, 148, 151, 160, 164, 166
Electrons, 34, 163
ellipsometer, 256, 276, 393
ellipsometric, 130, 251, 272, 273, 274, 275, 276, 277, 389, 395, 396, 397
Ellipsometric, 207, 272, 392, 396, 397
ellipsometry, 207, 213, 272, 273, 274, 275, 276, 277, 392, 393, 396, 397
emission, 25, 42, 45, 152, 161
Emission, 45, 76, 78, 79, 209, 211, 256
emissivity, 120, 143, 150
Emissivity, 205, 208
emit, 45, 131, 283
emittance, 83, 155, 210, 317
Emittance, 194
emittance control, 155
empirical, 56, 148, 157, 346
Empirical, 248
End-Hall, 160, 161, 163, 164, 165, 166, 171, 178
energetic, 20, 28, 37, 47, 104, 105, 118, 123, 142, 157, 160, 179, 186, 189, 205, 254, 281
energy, 4, 20, 24, 25, 26, 28, 31, 59, 102, 103, 104, 105, 106, 107, 109, 110, 111, 112, 114, 117, 124, 126, 134, 139, 149, 150, 154, 156, 157, 179, 180, 181, 186, 187, 188, 190, 207, 393
Energy, 191, 215
energy control, 107
enhanced, 103, 117, 120, 124, 140, 146, 186, 196, 238, 275, 277, 372
Enhanced, 1, 75, 106, 186, 194, 208, 214
environment, 45, 64, 81, 112, 117, 140, 148, 150, 151, 152, 183, 184, 191, 201, 224, 244, 271, 273, 275, 283, 316, 396
environmental, 127, 130, 132, 135, 141, 142, 149, 153, 186, 243, 244, 255, 279, 369
equation, 92, 96, 125, 341
equations, 96, 109, 124, 293, 298, 331, 346, 347, 348, 350, 351, 355, 387
equipment, iii, 1, 2, 7, 15, 19, 28, 30, 32, 33, 35, 36, 48, 60, 64, 65, 67, 68, 69, 70, 81, 99, 183, 188, 225, 232, 249, 250, 259, 273, 278, 279, 280, 315, 369, 370, 389, 390
Equipment, 1, 74, 209
equivalent, 15, 33, 34, 47, 83, 150, 272, 291, 306
erosion, 27, 45, 112, 113, 171, 215
Erosion, 112
error, 61, 63, 90, 92, 94, 125, 227, 232, 250, 260, 267, 269, 270, 279, 280, 282, 283, 285, 288, 290, 300, 302, 303, 304, 306, 308, 309, 310, 314, 319, 323, 333, 334, 335, 336, 337, 339, 340, 341, 342, 343, 344, 346, 347, 351, 353, 354, 361, 362, 367, 368, 369, 374, 375, 379, 380, 388, 389, 393, 394, 395
Error, 279, 302, 303, 307, 308, 312, 391, 394
error compensation, 267, 269, 279, 280, 282, 283, 290, 300, 304, 308, 309, 310, 333, 337, 361, 362, 367, 374, 375, 379, 388, 389, 393, 395
estimating, 180
Estimating, 392, 394
estimation, 166, 220, 250, 256, 260, 304, 348
etch, 157
EUV, 84
eV, 25, 31, 38, 39, 47, 102, 104, 105, 106, 109, 126, 127, 128, 131, 137, 138, 141, 160, 161, 166, 170, 180, 181, 184, 188, 273
evaporate, 14, 21, 24, 27, 28, 106, 115, 117, 122, 124, 137, 139, 143, 147, 225, 226, 227, 278, 315
evaporation, 13, 20, 22, 23, 24, 25, 26, 27, 28, 38, 40, 48, 54, 62, 65, 70, 76, 102, 106, 110, 115, 116, 117, 118, 121, 122, 128, 129, 131, 132, 133, 141, 142, 143, 144, 146, 147, 153, 154, 155, 165, 184, 185, 188, 190, 192, 193, 195, 199, 200, 201, 204, 209, 212, 214, 216, 219, 223, 225, 226, 227, 229, 231, 260, 264, 284, 310, 312, 368, 369, 389, 391
Evaporation, 20, 77, 209, 391
evaporation pattern, 115, 219
evaporation rate, 54, 226, 369
evaporation source, 22, 70, 115, 260, 310, 312
evaporation temperature, 20, 22, 23, 131, 132
example, 16, 22, 53, 54, 58, 62, 69, 83, 91, 105, 106, 123, 129, 172, 180, 220, 231, 236, 238, 252, 259, 260, 273, 275, 277, 278, 283, 290, 298, 312, 314, 315, 318, 322, 325, 339, 341, 344, 359, 369, 379, 389, 393
excess, 22, 42, 58, 105, 106, 119, 121, 160, 162, 163, 166, 180, 182, 225, 259, 367
extinction coefficient, 143, 144, 251, 255
F
Fabry-Perot, 57, 77, 280
Fe, 194
Fencepost, 371, 372, 374, 375, 377, 379, 388, 397
fiber, 83
Fiber, 75
filament, 21, 25, 26, 29, 32, 64, 118, 134, 148, 150, 151, 161, 219, 225, 226, 227, 229, 258, 278
film formation, 102, 213
film growth, 31, 103, 179, 199, 212, 213, 261, 273, 275, 389
film properties, 32, 152, 188, 315
film thickness, 132, 133, 137, 143, 144, 157, 268, 314, 374, 378, 396
filter, 12, 47, 57, 66, 76, 83, 104, 126, 130, 139, 140, 141, 149, 191, 205, 251, 252, 253, 254, 264, 270, 271, 277, 280, 281, 282, 285, 286, 287, 289, 290, 291, 298, 299, 300, 302, 303, 304, 306, 307, 308, 309, 310, 312, 313, 314, 316, 322, 326, 327, 328, 331, 333, 340, 342, 345, 347, 348, 350, 351, 359, 372, 379, 389, 394, 395
Filter, 47, 74, 280, 285, 288, 289, 298, 358
filtered arc, 76, 104, 140
first order, 281
fixture, 31, 53, 87, 367
Fixture, 53
fixturing, 8, 39, 48, 53, 54, 61, 162, 243, 258
Fixturing, 48, 49
flow, 9, 10, 14, 16, 33, 41, 42, 43, 45, 46, 54, 62, 63, 65, 76, 117, 123, 151, 160, 161, 162, 163, 164, 165, 166, 168, 169, 170, 171, 172, 173, 219, 223, 226, 232, 234, 250, 274
Flow, 9, 223, 250
flow control, 43, 46, 63, 65, 161, 165, 171, 232
flow rate, 41, 42, 63, 65, 123, 151, 163, 164, 171, 172, 173, 219, 232
flux, 103, 137, 157, 179, 275
Flux, 313
focus, 24, 25, 48, 84, 90, 251
focus error, 90
foil, 52, 56, 59, 63, 168, 170
foreline pressure, 9, 14, 15, 18
formula, 124, 272
Fourier, 82, 83, 198
FP, 4, 6
fractionating, 8, 13, 14
freeze, 16, 18, 104
frequency, 32, 33, 63, 97, 143, 152, 188, 200, 210, 261, 262, 314, 327, 330
Frequency, 77, 78, 196, 200, 201, 203
Fresnel, 292
friction, 187
fringe, 109
FTIR, 83, 368
G
gas, 2, 4, 8, 9, 10, 11, 12, 13, 14, 15, 19, 20, 21, 26, 28, 29, 30, 31, 33, 35, 37, 38, 40, 41, 42, 45, 46, 48, 54, 61, 62, 63, 65, 70, 103, 104, 111, 118, 122, 126, 128, 129, 134, 140, 146, 148, 151, 152, 153, 155, 158, 160, 161, 162, 163, 164, 165, 166, 168, 169, 170, 171, 172, 173, 180, 181, 182, 187, 219, 233, 234, 235, 236, 237, 314, 317, 339, 358
Gas, 11, 40, 62, 196, 206, 209, 211, 256
gas ballast, 13
gas control, 42, 152
gas load, 9, 12, 13, 15, 19
gas scattering, 33, 40, 54
gas transfer, 11
gauge, 42, 43, 54, 64, 65, 122
GD, 149
Ge, 58, 60, 83, 112, 114, 120, 130, 131, 134, 136, 190, 203, 215, 391
germanium, 60, 114, 130, 141, 187, 190, 207, 215, 315, 316, 356, 359
Germanium, 58, 130, 158, 191, 204, 356
getter, 19, 45, 163
global, iii
glow, 2, 4, 31, 48, 59, 65, 132, 133, 149, 179, 183, 186, 187, 238, 241, 242, 243, 244, 246, 247
Glow, 183, 208, 246
gold, 33, 104, 146, 147, 150, 151, 158, 194, 195, 199, 204, 225
Gold, 150, 151, 194, 195, 208
graphical, 194, 343, 391
graphics, 124, 220, 248, 348
grating, 82, 83, 84, 85, 268, 269, 270, 312, 314, 315
gridless, 118, 126, 127, 168, 171, 216
ground, 25, 28, 63, 161, 371
g-value, 323, 324, 325
H
hafnia, 110, 120, 121, 135, 136, 137, 138, 200, 201, 207
Hafnia, 135
hafnium, 24, 135, 191, 200
Hafnium, 135, 136, 201
Hafnium Fluoride, 136
Hafnium Oxide, 135
half wave, 92, 93, 111, 260, 323, 334
half-wave, 343
Half-wave, 334
hardness, 47, 108, 127, 128, 140, 155, 187, 188, 214, 220, 231, 371
heat, 1, 4, 19, 22, 23, 24, 26, 27, 56, 58, 59, 60, 61, 62, 65, 69, 102, 104, 106, 110, 116, 117, 122, 135, 150, 151, 153, 155, 188, 207, 210, 212, 225, 262, 264, 284, 345
Heat, 61, 74
helium, 18, 151
Hf, 119
HfF4, 136
HfO2, 24, 26, 110, 119, 135, 158, 193
high index, 56, 91, 96, 97, 118, 120, 126, 130, 132, 135, 139, 141, 143, 153, 292, 293, 295, 296, 297, 298, 315, 325, 343, 347, 348, 350, 351, 352, 359, 371, 372, 373, 374, 375, 378, 379, 380, 383, 384, 387
high reflector, 88, 110, 359
high voltage, 25, 26, 32, 63, 65, 117, 163, 170, 219, 241
higher order, 348
HMDSO, 48, 186
homogeneous, 94, 139, 190, 276, 278, 361
howitzer, 132, 133, 134
HPPMS, 46, 47, 79
humidity, 29, 58, 60, 81, 105, 107, 118, 119, 120, 126, 127, 131, 136, 137, 138, 141, 142, 143, 144, 145, 154, 160, 163, 171, 205, 220, 225, 231, 234, 236, 237, 279, 315
Humidity, 232, 235
hydrogen, 18, 26, 148, 154, 157
Hydrogen, 155
I
IAD, 24, 28, 29, 30, 31, 39, 47, 58, 60, 65, 101, 104, 105, 106, 110, 115, 118, 120, 123, 124, 126, 127, 128, 130, 131, 134, 135, 136, 137, 138, 139, 140, 141, 142, 144, 145, 146, 149, 150, 151, 153, 156, 160, 161, 163, 171, 174, 178, 179, 181, 182, 183, 184, 202, 211, 215, 216, 231, 254, 255, 270, 275, 277
IBAD, 152
IBS, 37, 38, 107, 129, 145, 146, 202, 204, 216
impedance, 45, 289
In3O5-SnO2, 151
incidence, 5, 6, 38, 56, 85, 87, 89, 90, 107, 111, 112, 114, 137, 191, 199, 274, 276, 277, 344, 393
Incidence, 198, 199
index of refraction, 81, 91, 114, 123, 124, 125, 126, 136, 138, 154, 155, 220, 231, 251, 252, 253, 254, 255, 266, 268, 269, 275, 316, 318, 319, 327, 338, 339, 346, 347, 350, 389
Index of refraction, 122
indirect monitoring, 277
Indirect monitoring, 251, 283
indium oxide, 150, 153, 195, 397
indium-tin oxide, 158
Indium-Tin Oxide, 151
induced, 9, 108, 109, 188, 198, 200, 201, 203, 206, 213
infrared, 58, 60, 61, 64, 83, 107, 114, 120, 127, 131, 132, 135, 137, 140, 146, 147, 150, 155, 156, 191, 194, 195, 197, 199, 207, 214, 315, 317, 348, 395
Infrared, 84, 190, 191, 192, 193, 194, 198, 200, 203, 206, 215, 393
inhomogeneity, 132, 137, 138, 144, 192, 200, 268
Inhomogeneity, 191
inhomogeneous, 129, 130, 138, 361
Inhomogeneous, 392, 396
inlet pressure, 12
in-line sputtering system, 68
in-line system, 40
insight, 127, 147, 248, 300, 347
intensity, 109, 112, 202, 274, 276, 283, 291, 320, 347, 350, 355, 396
Intensity, 199
interference, 97, 108, 191, 207, 215, 280, 310, 312, 314, 316, 392, 394, 395
Interference, 74, 75, 193, 222, 392, 394, 395
internal pressure, 11
intuitive, 108, 252
ion, 1, 19, 28, 30, 37, 38, 39, 47, 58, 60, 61, 62, 63, 65, 67, 69, 70, 74, 75, 76, 104, 105, 106, 114, 115, 117, 118, 119, 123, 126, 127, 128, 135, 137, 138, 139, 140, 152, 156, 157, 160, 162, 163, 164, 165, 166, 168, 169, 170, 171, 172, 174, 177, 179, 180, 181, 182, 183, 187, 188, 190, 191, 192, 194, 195, 199, 200, 204, 205, 206, 212, 213, 214, 215, 216, 219, 231, 232, 269, 270, 271, 275, 281, 309, 392, 395
ion assisted, 39, 74, 75, 114, 191, 215, 281
ion assisted deposition, 39, 74, 75, 114, 191, 215, 281
Ion assisted deposition, 194
ion beam, 29, 37, 38, 39, 58, 117, 119, 137, 152, 156, 160, 162, 163, 164, 188, 212, 213, 214, 270, 281
Ion beam, 190
ion beam sputtering, 39, 117, 156, 214, 270, 281
ion current, 106, 119, 160, 161, 165, 168, 169, 170, 171, 174, 232
Ion current, 75
ion gun, 38, 60, 67, 69, 118, 119, 232
ion plating, 28, 30, 74, 75, 76, 104, 106, 117, 157, 170, 205, 212, 271
Ion plating, 28, 104
ion source, 28, 37, 61, 62, 63, 65, 70, 106, 118, 126, 135, 160, 163, 165, 166, 168, 174, 180, 181, 188, 215, 216, 219
Ion source, 62, 65
ion voltage, 119, 164, 172, 232
ion-assisted deposition, 37, 58, 74, 75, 104, 119, 160, 174, 190, 191, 192, 195, 199, 200, 204, 205, 212, 216, 231
Ion-assisted deposition, 178, 190, 202, 216
ionization, 28, 29, 33, 34, 47, 64, 65, 163, 164
IRESS, 46
ITO, 143, 151, 152, 153, 154, 155, 158, 161, 208, 209, 210, 211, 274
K
kinetic, 14, 25, 103
Kinetic, 11
Knudsen, 50
Kr, 33, 182
Krypton, 33
k-value, 94, 96, 129, 135, 150, 232, 234, 237, 256, 356
L
La2O3, 145
LaF3, 111, 129, 134, 145, 146, 191, 193, 200
laminar, 16, 276
lanthanum fluoride, 202, 216
lanthanum oxide, 145
laser, 109, 110, 111, 112, 115, 118, 119, 123, 126, 127, 129, 130, 131, 132, 134, 139, 141, 142, 143, 144, 145, 156, 163, 185, 186, 188, 190, 191, 192, 193, 197, 201, 202, 203, 205, 206, 254, 290, 307, 314, 315, 397
Laser, 109, 111, 191, 198, 200, 201, 270, 368
laser beam, 111
lattice, 156
lead fluoride, 143
Lead Fluoride, 143
Lead Telluride, 135
leak, 70
lens, 53, 61, 109
limitation, 35, 83, 171, 184, 262, 314
liquid nitrogen, 2, 4, 15
Liquid nitrogen, 68, 69
LN2, 15, 16, 17, 18, 19, 59, 69, 71
local minima, 331
Longwave pass, 322
loss, 26, 69, 83, 85, 92, 117, 122, 138, 157, 182, 277, 281, 293, 294, 300, 301, 303, 333, 361
Loss, 191
low index, 26, 56, 96, 97, 98, 100, 111, 114, 115, 117, 119, 129, 131, 139, 144, 153, 185, 266, 293, 294, 314, 325, 327, 343, 344, 347, 348, 350, 351, 356, 357, 358, 371, 374, 378, 379, 381, 382, 383, 384, 386, 387
LVIP, 28, 29
LVRIP, 28, 29, 30, 110, 120
LWP, 186, 322, 327, 328, 347, 351, 355
LWP filter, 186, 322, 328, 351
M
magnesium fluoride, 190, 207, 216, 265, 283
Magnesium Fluoride, 127, 190, 207
magnesium oxide, 129, 207, 393
Magnesium Oxide, 129, 193
magnetic field, 25, 29, 30, 33, 37, 47, 161, 163, 164
magnetron, 7, 29, 33, 37, 40, 41, 43, 45, 46, 73, 74, 79, 129, 134, 140, 142, 143, 149, 152, 153, 155, 156, 193, 202, 203, 204, 205, 206, 212, 213, 269, 270, 277, 389, 393, 397
Magnetron, 33, 34, 35, 37, 40, 46, 73, 74, 76, 77, 78, 79, 205, 208, 210, 211, 393
magnets, 37, 40, 161, 163
masks, 49, 55, 56, 57, 58, 118, 119, 134, 367
Masks, 55, 57
mass flow, 46, 171, 232
mass spectrometer, 42
matching, 32, 85, 88, 326, 327, 328, 329, 331, 334
materials, iii, 1, 20, 22, 23, 26, 28, 31, 32, 33, 38, 40, 47, 49, 50, 52, 53, 54, 56, 57, 58, 61, 62, 65, 66, 70, 79, 81, 83, 84, 91, 96, 101, 102, 106, 107, 109, 111, 112, 114, 115, 118, 120, 121, 122, 123, 127, 130, 131, 133, 134, 135, 137, 140, 141, 143, 144, 145, 146, 149, 150, 156, 157, 158, 160, 163, 172, 181, 183, 184, 185, 186, 187, 189, 190, 192, 193, 196, 203, 205, 207, 214, 215, 219, 224, 255, 256, 261, 263, 269, 270, 275, 277, 283, 294, 312, 314, 316, 317, 339, 343, 344, 350, 362, 367, 369, 377, 379, 387, 396
Materials, 22, 24, 26, 81, 115, 154, 158, 188, 190, 191, 198, 202, 206, 209, 210, 211, 212, 213, 214, 283, 397
matrix, 18, 157, 229, 232
Matrix, 273
max/min, 267, 340, 362, 369, 389
Max/Min, 336, 387
max-min, 373, 374, 375, 378, 379, 380
Max-Min, 378, 382, 383, 384
MBE, 273
mean free path, 4, 6, 7, 32, 33, 52, 54, 119, 171
measurement, 61, 65, 82, 83, 88, 89, 108, 128, 136, 142, 207, 250, 256, 260, 262, 269, 271, 272, 274, 275, 276, 314, 315, 395, 396
Measurement, 108, 198
mechanical, ii, 8, 9, 12, 13, 15, 16, 17, 19, 24, 61, 69, 82, 108, 110, 113, 128, 138, 142, 149, 200, 204, 214, 261, 268, 368
Mechanical, 12, 196, 199, 200, 208, 248
mechanical properties, 108, 113, 138, 204, 214
mechanical pump, 8, 9, 12, 13, 15, 16, 17, 19, 69
medium frequency, 143, 152, 188
Meissner, 16, 17, 59, 61
merit, 140, 267, 268, 269, 294, 329
metal, 22, 24, 28, 33, 35, 40, 41, 42, 45, 46, 47, 52, 76, 112, 119, 123, 136, 138, 139, 140, 146, 147, 149, 150, 153, 154, 170, 178, 180, 184, 185, 187, 194, 242, 396
Metal, 77, 149, 188, 195, 208
metal oxide, 33, 184
MetaMode, 35, 36
MgF2, 2, 21, 22, 58, 59, 97, 102, 103, 111, 112, 114, 115, 127, 128, 129, 131, 136, 145, 146, 148, 152, 153, 158, 181, 182, 190, 193, 200, 204, 207, 210, 254, 255, 260, 261, 264, 283, 361, 363, 367
MgO, 128, 129, 158, 193
micron, 131
microstructure, 130, 146, 149, 153, 194, 199, 200, 202, 277, 394
Microstructure, 194
microwave, 35, 186, 188
minimum, iii, 61, 66, 83, 134, 139, 147, 151, 157, 162, 222, 226, 228, 229, 244, 248, 264, 268, 269, 292, 294, 300, 315, 320, 333, 336, 337, 339, 341, 344, 350, 351, 359, 361, 362, 374, 378, 389
mirror, 30, 40, 87, 88, 89, 90, 109, 146, 147, 150, 154, 183, 194, 196, 209, 223, 224, 258, 259, 260, 278, 381
Mirror, 203
mixture, 13, 32, 128, 138, 139, 145, 165, 166, 170, 173, 187, 219, 232
mobility, 31, 103, 104
modified, 28, 42, 120, 165
Modified, 208
moisture, 69, 141
Moisture, 197, 208
mole, 105, 106, 220
molecular beam, 273, 397
molecular flow, 9, 16, 54
molecular rate, 5, 6
molybdenum, 20, 24, 26, 122, 127, 131, 132, 133, 135, 141, 142, 143, 144, 150, 154, 161, 163
momentum, 14, 31, 33, 104, 106, 157, 181, 182, 188, 216, 272
monitor, 4, 60, 63, 64, 66, 91, 92, 96, 97, 114, 115, 131, 152, 232, 242, 251, 252, 254, 256, 258, 261, 262, 263, 264, 265, 266, 267, 268, 271, 272, 275, 276, 277, 278, 279, 280, 281, 282, 283, 285, 286, 287, 288, 290, 291, 294, 300, 301, 307, 308, 309, 310, 311, 312, 313, 314, 315, 316, 317, 318, 319, 320, 321, 322, 323, 324, 325, 326, 333, 334, 335, 337, 338, 339, 342, 343, 344, 346, 347, 350, 351, 355, 356, 359, 360, 362, 365, 367, 368, 369, 372, 373, 376, 377, 378, 379, 380, 381, 388, 389, 393
Monitor, 45, 256, 267, 281, 310, 313, 317, 325, 378
monitor chip, 66, 115, 264, 267, 283, 310, 311, 312, 315, 317, 320, 322, 323, 324, 325, 333, 339, 342, 344, 359, 362, 365, 368, 379, 389
monitor system, 63
monitoring, iii, 63, 66, 67, 91, 97, 150, 152, 207, 212, 223, 249, 250, 251, 252, 254, 256, 257, 258, 259, 260, 261, 262, 263, 264, 265, 266, 267, 268, 269, 270, 271, 272, 273, 274, 275, 277, 278, 279, 280, 281, 282, 283, 285, 286, 287, 288, 290, 291, 293, 294, 295, 296, 297, 298, 303, 304, 305, 306, 307, 308, 309, 310, 311, 312, 314, 315, 316, 317, 319, 320, 322, 323, 325, 326, 327, 328, 330, 331, 332, 333, 334, 337, 338, 339, 340, 342, 343, 345, 346, 347, 348, 349, 350, 351, 352, 353, 354, 355, 356, 357, 358, 359, 360, 362, 364, 365, 366, 367, 368, 370, 372, 373, 374, 375, 377, 378, 379, 381, 382, 383, 384, 388, 389, 390, 391, 392, 393, 394, 395, 396, 397
Monitoring, 78, 209, 211, 249, 250, 251, 261, 264, 265, 266, 278, 280, 285, 287, 288, 290, 294, 300, 303, 307, 309, 312, 319, 333, 338, 346, 364, 367, 369, 371, 376, 379, 381, 388, 391, 392, 394, 395, 396
monitoring system, 249, 250, 252, 259, 262, 270, 280, 317, 331, 333, 338, 368, 391
monomer, 48, 184
Movchan, 103, 105, 199
MPP, 46
MSDS, 158
multilayer, 120, 130, 191, 199, 201, 205, 261, 278, 312, 322, 391, 393, 394, 395, 397
Multilayer, 77, 191, 193, 196, 208, 209, 215, 395, 396
N
narrow bandpass, 108, 139, 252, 253, 263, 264, 290, 298, 376, 379, 394
Narrow bandpass, 280
narrowband, 209
Nb2O5, 136, 158, 270
NBP, 149, 251, 252, 254, 264, 271, 277, 280, 281, 282, 283, 285, 288, 289, 290, 298, 306, 309, 310, 312, 314, 316, 356, 358, 374, 376, 377, 379, 380, 381, 382, 383, 387, 388, 389
NBP filter, 149, 254, 264, 271, 277, 280, 281, 282, 283, 285, 306, 309, 310, 312, 356, 358, 376, 377, 379, 380, 381, 382, 383, 387, 388, 389
nd filter, 76
Nd2O3, 136, 158
NdF3, 103, 136, 214
neodymium oxide, 136
neon, 18, 31
neutral, 147
neutral density filter, 147
neutralizer, 118, 161, 162, 163, 164, 165, 166, 167, 170, 171, 173
neutralizer control, 165
ni, 272
Ni, 194
nichrome, 59
Nichrome, 59, 146
nickel, 212
niobia, 120, 121, 135, 136, 137, 138
Niobia, 120
niobium oxide, 136
nodules, 110, 111
noise, 63, 66, 82, 165, 224, 225, 226, 252, 263, 265, 269, 271, 287, 290, 312, 317, 319, 320, 356, 367, 368
Noise, 223, 224, 287
non-normal, 114, 274, 276
non-QWOT, 382
nucleation, 103, 133, 146, 149, 150, 156, 157, 212, 275
Nucleation, 199, 208, 215
number of layers, 121, 127, 129, 250, 260
n-value, 129
O
oblique, 207
OD, 382
oil, 9, 12, 13, 14, 15, 16, 19, 85, 258
operator error, 62, 369
optical density, 377, 379
optical monitoring, 63, 67, 150, 251, 252, 260, 264, 265, 266, 271, 279, 280, 283, 290, 291, 295, 296, 297, 298, 309, 315, 326, 331, 334, 338, 345, 358, 362, 367, 370, 372, 373, 376, 378, 379, 388, 389, 391, 392, 394, 395
Optical monitoring, 207, 310, 332, 333, 391
optical path, 57, 82, 87, 90, 368
optical properties, 114, 136, 147, 151, 152, 161, 190, 191, 192, 195, 203, 205, 251, 252, 274, 393
Optical properties, 190, 191, 194, 195, 197, 200, 206, 216
optical property, 91, 256
optical thickness, 62, 66, 91, 92, 111, 138, 185, 249, 251, 252, 253, 254, 255, 256, 260, 261, 262, 264, 265, 266, 279, 290, 304, 314, 316, 317, 318, 320, 322, 323, 339, 343, 344, 346, 362, 372, 376, 378, 387, 389, 391
Optical thickness, 391
optical thickness monitor, 66
Optical thickness monitor, 391
Optical thickness monitoring, 391
optimization, iii, 92, 93, 94, 96, 119, 136, 219, 220, 268, 270, 317, 326, 327, 328, 329, 331, 392, 393
Optimization, 78, 197, 204, 207, 391
order, 9, 33, 38, 48, 62, 67, 69, 102, 106, 112, 114, 125, 148, 155, 156, 158, 166, 168, 171, 184, 220, 242, 246, 250, 251, 262, 267, 269, 272, 275, 279, 281, 282, 288, 298, 306, 307, 319, 320, 346, 348, 361, 365, 368, 369
organic, 124, 154, 185, 238
Organic, 204, 209
oscillation, 61, 326
outgassing, 9, 118, 122, 139, 141, 256, 316, 317
overcoat, 135, 140, 152, 183, 187, 212
Overcoat, 197
overpressure, 18
oxidation, 39, 97, 117, 120, 148, 165, 183, 225
P
packing density, 50, 52, 58, 114, 123, 127, 128, 130, 131, 133, 136, 140, 141, 144, 151, 271
PACVD, 186
partial pressure, 42, 43, 46, 54, 62, 64, 219, 255
Pascal, 7
pass band, 322, 326, 327, 328, 331, 334, 337, 377, 381, 382, 389
PbF2, 143, 158, 193
PbTe, 135, 158
PD, 111
PECVD, 1, 21, 48, 101, 106, 112, 117, 120, 156, 186, 187, 188, 196, 197, 215, 248, 275, 396
performance, 15, 25, 62, 67, 68, 112, 130, 149, 152, 153, 154, 155, 160, 166, 171, 189, 194, 196, 246, 264, 270, 281, 282, 285, 290, 296, 297, 298, 300, 306, 309, 310, 312, 322, 323, 328, 334, 335, 336, 337, 338, 359, 360, 361, 363
Performance, 75, 196, 203, 211, 394
periodic, 209, 289, 322, 323, 325, 326, 327, 328, 329, 333, 339, 342, 345, 346, 347, 349, 354, 355, 359, 391
Periodic, 392
phase, 27, 61, 68, 82, 101, 102, 123, 124, 138, 156, 157, 185, 187, 209, 212, 213, 226, 277, 292, 300, 302, 303, 310, 311, 312, 320, 326, 327, 329, 330, 331, 339, 347, 349, 389, 393
photomultiplier, 45, 270, 316
physical properties, 103, 114, 132, 381
physical thickness, 58, 66, 94, 249, 272, 290, 298, 346, 372
physical vapor deposition, 78, 103, 116, 117, 183, 256, 258, 284
planar magnetron, 40, 74, 129, 140
planet, 50, 52, 53, 54, 56, 64, 69, 219, 315, 362
Planet, 316
planetary, 50, 54, 59, 60
plasma, 28, 29, 30, 31, 32, 33, 35, 37, 40, 45, 46, 47, 48, 75, 76, 115, 117, 118, 120, 129, 136, 140, 146, 149, 152, 160, 162, 167, 168, 169, 170, 171, 172, 174, 177, 183, 184, 186, 187, 188, 196, 197, 206, 213, 214, 215, 275, 277, 393, 396
Plasma, 1, 29, 45, 73, 74, 75, 76, 77, 106, 166, 186, 196, 197, 202, 208, 209, 211, 214, 215, 216, 393
plasma source, 28, 29, 30, 115, 118, 136, 160, 162, 167, 168, 169, 171, 172, 177, 183, 184, 186
plastic, 61, 68, 72, 106, 117, 147, 153, 156, 187, 371, 397
Plastic, 73, 76, 77, 197, 205, 206, 211
poison, 42
polarization, 37, 82, 85, 87, 138, 199, 272, 274, 277, 372
Polarization, 192, 213
polarizer, 82, 107, 188
Posthole, 371, 372
p-polarized, 275
praseodymium, 137
precise, 50, 81, 89, 250, 261, 262, 318, 374, 378, 387, 394
precision, 251, 252, 261, 269, 275, 279, 317, 368, 391
preparation, 9, 183, 185, 219
Preparation, 183, 214
pressure, 1, 2, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 18, 26, 30, 31, 32, 33, 41, 42, 43, 46, 54, 55, 61, 62, 63, 64, 65, 69, 103, 104, 107, 110, 118, 119, 121, 122, 123, 124, 125, 126, 128, 134, 140, 151, 154, 155, 157, 160, 161, 162, 163, 165, 166, 168, 171, 172, 173, 174, 175, 186, 188, 212, 219, 223, 225, 226, 227, 229, 231, 232, 238, 239, 240, 241, 242, 246, 254, 255, 256, 278, 316, 339, 345, 368
Pressure, 11, 213
pressure control, 42, 63, 65, 126
pressure differential, 13
principal, 29, 61, 152, 161, 171, 183, 348, 350
principle, 33, 34, 110, 128, 164, 252, 257, 264, 266, 300, 326, 338, 339, 340, 371, 389
prism, 82, 84, 85, 268, 312, 314
procedure, 13, 60, 64, 96, 97, 108, 315, 317, 326, 329, 331, 340, 381
process control, 4, 62, 64, 250, 261
Process control, 64
production, iii, 15, 26, 30, 40, 45, 48, 50, 59, 64, 65, 67, 68, 69, 70, 74, 101, 102, 117, 118, 119, 120, 122, 124, 130, 139, 143, 152, 153, 158, 160, 162, 166, 171, 215, 222, 223, 224, 225, 238, 244, 246, 252, 256, 257, 261, 262, 271, 273, 275, 277, 278, 279, 283, 316, 319, 325, 326, 339, 345, 346, 365, 366, 367, 369, 372, 388, 389, 390, 391, 394, 395, 396
production error, 388
properties, 1, 28, 32, 47, 76, 103, 106, 108, 109, 112, 114, 115, 117, 118, 120, 122, 123, 127, 129, 132, 133, 135, 136, 138, 139, 144, 145, 146, 147, 148, 149, 151, 152, 153, 154, 160, 161, 178, 184, 186, 188, 190, 191, 192, 193, 194, 195, 197, 199, 200, 201, 202, 203, 204, 205, 206, 207, 210, 212, 213, 214, 216, 249, 250, 251, 252, 255, 272, 274, 275, 290, 292, 304, 315, 326, 340, 341, 348, 381, 387, 389, 391, 393
Properties, 74, 76, 191, 192, 193, 194, 195, 196, 197, 199, 200, 203, 204, 205, 207, 208, 211, 214, 248, 392, 394
protected, 132, 148, 149, 192, 205, 260
Protected, 191
protection, 113, 186, 187, 197, 206
Protection, 52
protective, 48, 59, 112, 120, 127, 129, 135, 137, 140, 143, 149, 183, 184, 187, 215
Protective, 192, 205
psi, 273
pulse, 26, 46, 109, 111, 149, 157, 203
Pulse, 79, 206
pump, 2, 4, 8, 9, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 45, 62, 65, 68, 71, 111, 227, 241, 278
Pump, 11, 13, 78
pump down, 241
pumping system, 8, 65, 227
PVD, 1, 2, 8, 20, 48, 74, 76, 101, 106, 110, 129, 140, 156, 183, 185, 198, 203, 204, 256, 397
Q
QMB, 261, 262, 315, 373, 376, 378, 383
quarter wave, 114, 145, 249, 265, 315, 355, 361, 372, 378
quarter-wave, 347
quartz, 24, 26, 58, 59, 65, 115, 271, 314, 317, 373, 376
Quartz, 261
R
racetrack, 40
radiation, 18, 22, 33, 59, 111, 131, 133, 134, 142, 155, 191, 200, 277
radiative properties, 153
radio frequency, 32, 210
rain erosion, 112, 113
random error, 263, 264, 271, 279, 280, 288, 289, 290, 294, 298, 299, 300, 304, 305, 306, 334, 361, 363, 367
rate, 5, 6, 21, 22, 32, 33, 42, 45, 46, 47, 53, 54, 58, 63, 65, 66, 79, 82, 104, 105, 106, 107, 111, 118, 119, 121, 123, 124, 125, 126, 136, 143, 144, 146, 147, 148, 151, 160, 163, 171, 172, 173, 179, 199, 219, 225, 226, 227, 232, 234, 236, 242, 243, 244, 245, 254, 255, 256, 261, 262, 270, 278, 279, 288, 290, 294, 314, 317, 319, 320, 339, 352, 367, 369, 370, 389, 393, 394
Rate, 74, 77, 210, 211, 232, 234, 236, 237, 261, 397
reactive, 4, 28, 30, 33, 35, 39, 40, 41, 42, 43, 44, 45, 46, 48, 54, 65, 74, 75, 76, 79, 104, 117, 120, 138, 140, 143, 145, 149, 153, 154, 155, 160, 170, 185, 186, 190, 193, 195, 201, 203, 205, 209, 212, 219, 232, 271, 277, 346, 391, 393, 397
Reactive, 28, 29, 30, 41, 46, 73, 74, 75, 76, 77, 78, 79, 155, 184, 185, 195, 196, 197, 201, 202, 203, 205, 206, 208, 209, 211, 216, 255
reactive deposition, 160
reactive evaporation, 48, 65, 154, 185, 195, 212, 391
reactive gas, 30, 41, 42, 45, 46, 219
reactive ion plating, 75, 104, 117, 170, 205, 271
reactive plasma, 35
reactive process, 54, 160, 346
reactive sputtering, 33, 39, 40, 41, 42, 44, 45, 79, 138, 143, 153
reference beam, 84, 86, 368
refinement, 219, 223, 365
reflectance, 21, 56, 59, 81, 83, 84, 87, 88, 89, 90, 91, 93, 94, 96, 97, 99, 100, 109, 130, 146, 147, 148, 149, 150, 151, 153, 183, 191, 194, 199, 206, 209, 225, 227, 228, 229, 231, 238, 243, 250, 254, 256, 259, 260, 264, 265, 266, 267, 271, 274, 275, 276, 290, 292, 293, 300, 301, 302, 317, 319, 320, 321, 322, 323, 324, 325, 326, 327, 328, 329, 330, 331, 333, 339, 340, 341, 342, 343, 346, 347, 348, 349, 350, 351, 356, 359, 362, 365, 368, 389, 392
Reflectance, 75, 87, 98, 99, 194, 198, 206, 248, 292, 320, 323, 324, 357, 392, 393
reflectance amplitude, 300, 320, 329, 342, 347, 349
reflectance diagram, 320, 321, 322, 323, 324, 325, 329, 356, 389
reflectance intensity, 274, 320
reflectance measurement, 87, 209, 276
reflected amplitude, 331
reflected intensity, 274, 291, 347, 350, 355
reflecting, 81, 87, 149, 153, 195, 209, 210, 212, 224, 226
Reflecting, 208
reflection properties, 1
reflectivity, 112, 148, 154, 202, 204, 209
refractive index, 109, 137, 141, 191, 207, 254, 255, 393
Refractive index, 192, 193
refrigeration system, 15
residual gas, 4, 21, 61, 147, 152, 317
resistivity, 143, 152, 153, 154, 155
Resistivity, 211
Resolving, 194
reverse engineer, 98, 199
Reverse engineer, 99
rf, 120, 214, 269, 270
RF, 32, 33, 134, 186, 187, 197, 205
RF sputtering, 32, 187
RGA, 62, 148, 152, 256
rhodium, 146, 206
Rhodium, 146
ring, 30, 52, 53, 161, 251, 252
RIP, 28, 29, 101, 104, 106, 184, 255
ripple, 298, 300, 307
Ripple, 299
RLVIP, 28, 29, 75, 105, 108, 139
robust, 31, 40, 42, 45, 47, 62, 106, 130, 131, 162, 244, 255, 275, 331
roots blower, 15
Roots blower, 15, 16, 17
Roots pump, 15
rough, 8, 9, 10, 11, 13, 19, 157
roughing, 8, 9, 12, 15, 16, 18, 19
roughing pump, 18
rugate, 141, 270, 275, 277, 393, 395
Rugate, 392
rugate filter, 141, 270, 277, 395
S
safety, 65
Safety, 158
salt fog, 81, 279
sample, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 93, 94, 109, 220, 221, 222, 252, 272, 275, 310, 330, 368
sample beam, 84, 85, 87, 368
sapphire, 112, 155
Sapphire, 120, 193
Sc2O3, 142, 158
Scandia, 142, 159
scandium oxide, 142
Scandium Oxide, 142
scatter, 114, 144, 153, 207
Scatter, 207
scattering, 33, 40, 54, 59, 91, 115, 127, 128, 129, 138, 146, 149, 151, 194, 208, 212, 227, 273, 275, 277, 316, 367, 392
Scattering, 107, 129, 146, 194, 204, 206
SCCM, 62, 65, 118, 162, 163, 164, 167, 170, 232, 234, 236
scratch, 150, 371
seal, 8, 12
second order, 124, 220
Selenium, 158
semiconductor, 19, 20, 39, 48, 50, 51, 65, 84, 106, 120, 129, 130, 146, 147, 155, 185, 202, 249, 272, 273, 274, 275, 396, 397
Semiconductor, 205, 396
sensitivity, 139, 255, 266, 267, 269, 285, 299, 300, 302, 303, 306, 309, 320, 321, 322, 323, 325, 326, 337, 338, 346, 347, 351, 362, 369, 379, 381, 389, 391
Sensitivity, 300, 302, 320, 322, 392, 394
shift, 58, 69, 83, 84, 103, 105, 118, 119, 126, 127, 131, 136, 137, 138, 139, 163, 220, 231, 234, 235, 236, 237, 315, 316, 325, 342, 379
si, 26, 58, 97, 110, 115, 116, 117, 118, 119, 126, 129, 139, 144, 185, 192, 202, 203, 341, 396
Si, 83, 120, 134, 156, 181, 185, 186, 191, 197, 204, 212
Si3N4, 120, 143, 186, 205, 208
sign, 138
signal, 45, 46, 66, 82, 83, 85, 252, 264, 265, 266, 269, 271, 286, 287, 288, 290, 291, 298, 305, 310, 311, 312, 317, 318, 319, 320, 333, 347, 356, 359, 367, 368, 388, 389
Signal, 287, 338
silica, 26, 58, 97, 110, 115, 116, 117, 118, 119, 126, 129, 139, 144, 185, 192, 202, 203, 341, 396
silicon, 40, 108, 109, 115, 116, 117, 118, 119, 120, 149, 151, 156, 157, 186, 194, 195, 196, 200, 205, 213, 273, 284, 315
Silicon, 26, 115, 117, 119, 120, 191, 195, 196, 200, 205, 206, 248, 396
silicon dioxide, 115, 116, 117, 118, 119, 284, 315
Silicon Dioxide, 195, 396
silicon monoxide, 117, 118, 119
silicon nitride, 115, 120, 149, 196, 205
Silicon Nitride, 119, 205
silver, 40, 110, 120, 137, 138, 140, 143, 148, 149, 150, 158, 184, 194, 204, 207
Silver, 148, 192, 194, 205, 208
simulation, 103, 104, 199, 267, 269, 290, 346, 347, 394
single beam, 82, 368, 390
SiO, 21, 22, 68, 97, 115, 117, 118, 119, 133, 134, 135, 138, 148, 158, 160, 163, 165, 171, 260, 346
SiO2, 4, 24, 26, 27, 48, 52, 54, 56, 58, 62, 68, 73, 96, 97, 105, 106, 108, 110, 111, 114, 115, 117, 118, 119, 120, 126, 127, 134, 135, 138, 139, 140, 146, 152, 158, 160, 163, 165, 166, 171, 181, 185, 186, 193, 196, 200, 205, 214, 270, 283, 346, 350, 361, 362, 367, 369, 371
SLAR, 144, 260, 261, 264, 274, 278, 279, 314
small error, 387
SNR, 287, 288, 314
solar control, 68, 149
spatter, 26, 47, 133
SPC, 222
specification, 68, 251, 298, 305, 306
spectral properties, 340
spectral reflectance, 243, 392
spectrophotometer, 81, 82, 83, 84, 85, 90, 198, 260, 261, 270, 278, 314, 315, 317, 319, 368
Spectrophotometer, 198
specular, 81, 83, 153, 199, 224, 226
spit, 26
sputter, 29, 34, 35, 39, 40, 41, 42, 153, 157, 183, 204, 215
Sputter, 46, 73, 76, 77, 78, 79, 206, 210, 211, 393
sputtering, 1, 7, 28, 29, 31, 32, 33, 34, 35, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 48, 50, 68, 73, 74, 78, 79, 103, 104, 106, 117, 119, 120, 123, 127, 128, 129, 134, 138, 139, 140, 143, 145, 148, 149, 151, 152, 153, 155, 156, 160, 161, 179, 180, 181, 183, 184, 185, 187, 192, 193, 198, 202, 203, 204, 205, 206, 210, 212, 213, 214, 225, 252, 256, 261, 269, 270, 277, 281, 290, 314, 370, 389, 393, 395, 397
Sputtering, 20, 30, 31, 32, 33, 34, 35, 37, 39, 40, 41, 46, 73, 74, 76, 77, 78, 79, 104, 192, 195, 197, 198, 200, 203, 205, 208, 210, 211
sputtering rate, 32, 33, 42
stability, 40, 108, 115, 120, 123, 139, 142, 147, 153, 160, 165, 171, 191, 200, 205, 210, 251, 252, 254, 255, 262, 269, 307, 314, 316, 317, 319, 334, 338, 339, 346, 368, 369, 379, 388, 389
Stability, 74
stainless steel, 59, 165
standard, 88, 162, 163, 220, 232, 275, 317, 348, 361, 381
Standard, 210, 223, 226, 232
starting design, 328, 329, 342
steep, 98, 106
sticking coefficient, 58, 132, 133, 134
stoichiometric, 41, 42, 111, 128, 155
stop band, 323, 347
strain, 212
Strain, 213
stress, 28, 75, 107, 108, 109, 110, 112, 115, 120, 128, 129, 130, 132, 133, 134, 136, 137, 139, 141, 143, 144, 145, 147, 156, 157, 184, 187, 191, 203, 206, 213, 242, 262, 316
Stress, 107, 108, 112, 191, 200, 392
structural properties, 112
sublimation, 116, 117, 133, 147
sublime, 27, 134
Substance, 138, 145, 151
substrate, 1, 2, 4, 7, 28, 29, 30, 31, 34, 37, 38, 39, 47, 48, 49, 50, 53, 55, 56, 58, 60, 61, 65, 81, 91, 92, 94, 96, 97, 102, 103, 104, 105, 106, 107, 108, 111, 112, 124, 127, 128, 132, 133, 137, 138, 139, 140, 141, 143, 146, 147, 151, 154, 156, 157, 162, 167, 171, 179, 183, 185, 190, 191, 199, 200, 202, 212, 219, 227, 238, 243, 251, 252, 254, 255, 258, 260, 264, 265, 274, 275, 278, 280, 281, 283, 292, 299, 317, 322, 325, 326, 327, 328, 329, 341, 342, 345, 347, 359, 376, 381, 382, 391, 393
substrate cleaning, 65, 278
substrate temperature, 60, 103, 105, 106, 124, 126, 127, 128, 137, 140, 141, 143, 146, 147, 154, 157, 185, 190, 191, 212, 219, 254, 255, 391
Substrate temperature, 135
sweep system, 48
SWP, 347, 351, 355
SWP filter, 347
symmetric, 97, 99, 209, 280, 288, 300, 321
synthesis, 185, 212
Synthesis, 205, 212, 213
system, ii, 8, 9, 10, 11, 15, 18, 19, 25, 28, 30, 32, 33, 35, 40, 45, 46, 47, 48, 50, 54, 59, 63, 64, 65, 66, 67, 68, 69, 70, 72, 82, 83, 88, 89, 103, 104, 123, 131, 152, 155, 161, 163, 164, 165, 166, 168, 170, 174, 182, 183, 184, 187, 200, 206, 227, 248, 249, 250, 252, 256, 258, 259, 261, 262, 264, 268, 269, 270, 271, 272, 273, 275, 276, 277, 278, 279, 280, 288, 297, 317, 319, 342, 343, 362, 368, 369, 370, 391, 393, 394, 395
System, 29, 32, 46, 74, 77, 198, 200
T
ta, 7, 13, 17, 69, 121, 226, 314
Ta, 139, 155
Ta2O5, 108, 136, 139, 158, 200
tantala, 139, 192
Tantala, 139
tantalum, 20, 22, 122, 127, 131, 133, 134, 135, 139, 143, 144, 148, 150, 192, 205
Tantalum, 139
Tantalum Pentoxide, 139
tape test, 137, 242, 243
target, 31, 33, 34, 35, 38, 40, 41, 42, 45, 46, 104, 106, 152, 213, 231, 244, 267, 269, 272, 291, 322, 325, 330, 343, 344
Target, 46, 73, 77, 208, 210, 211
temperature, 2, 4, 8, 10, 11, 15, 18, 19, 21, 22, 23, 24, 53, 54, 58, 59, 60, 61, 62, 63, 102, 103, 104, 106, 107, 108, 118, 120, 121, 122, 123, 124, 125, 127, 128, 129, 130, 131, 132, 133, 134, 136, 137, 138, 139, 140, 141, 143, 144, 146, 147, 154, 155, 157, 160, 166, 181, 188, 190, 191, 195, 198, 202, 205, 212, 213, 215, 219, 225, 232, 254, 255, 256, 262, 274, 276, 278, 279, 315, 316, 317, 339, 368, 391
temperature control, 63, 255
tensile stress, 107, 133, 137, 144, 147, 154
TEOS, 186
terminate, 63, 260, 264, 265, 266, 269, 287, 288, 290, 291, 305, 374, 378, 379, 383, 389
terminated, 62, 262, 266, 267, 280, 287, 290, 291, 292, 294, 295, 296, 297, 298, 303, 331, 337, 339, 341, 349, 354, 376, 378, 379, 380, 388
terminating, 265, 268, 279, 281, 282, 298, 304, 312, 379
theory, 33, 108, 151, 222, 269
Theory, 195, 198, 395
thermal, 22, 24, 27, 28, 30, 53, 59, 61, 83, 106, 107, 108, 110, 111, 118, 128, 136, 139, 149, 153, 155, 157, 166, 210, 242, 283
thermal control, 83
thermal evaporation, 128, 153
thermal properties, 153
thermocouple, 60, 61, 65, 130
ThF4, 60, 114, 130, 131, 132, 136, 145, 158, 191
thickness control, 63, 254, 261, 270
thickness monitor, 66, 223, 288, 290, 298, 391
thin film, iii, 48, 74, 76, 92, 101, 115, 123, 129, 135, 137, 138, 144, 154, 156, 179, 183, 185, 189, 191, 192, 193, 198, 199, 200, 201, 202, 203, 204, 205, 206, 207, 209, 210, 212, 213, 214, 216, 222, 249, 250, 251, 252, 256, 257, 258, 261, 264, 266, 273, 275, 277, 279, 280, 282, 283, 327, 328, 339, 343, 350, 358, 365, 370, 389, 390, 391, 392, 393, 394, 395, 397
Thin film, 78, 135, 200, 207, 371
thin film design, 92, 328, 343, 350, 365, 370
thin-film, 190, 193, 199, 200, 201, 207, 216, 393, 394, 395
third order, 281
thorium fluoride, 114, 136, 191, 356, 359
Thorium Fluoride, 131, 190, 191, 199
three cavity filter, 290
Ti, 47, 121, 123, 150, 181, 185, 194, 275
Ti2O3, 26, 121, 123, 158, 204
Ti3O5, 121
tilt, 54, 83
tilted, 50, 84, 207
Tilted, 54
tilting, 314
time, 5, 6, 8, 13, 17, 19, 21, 24, 27, 28, 33, 34, 43, 45, 46, 47, 49, 55, 56, 59, 61, 62, 63, 64, 67, 68, 69, 72, 81, 82, 83, 89, 102, 107, 109, 112, 115, 117, 126, 130, 131, 139, 152, 155, 163, 171, 183, 212, 219, 220, 224, 225, 226, 227, 229, 232, 238, 241, 242, 243, 244, 246, 247, 249, 251, 256, 257, 260, 261, 262, 265, 268, 269, 270, 275, 277, 278, 283, 288, 290, 291, 294, 307, 308, 310, 314, 315, 317, 319, 325, 338, 339, 342, 367, 369, 373, 376, 378, 379, 383, 388, 389, 393, 395, 396, 397
time-power, 251, 290, 376, 379
TiO, 96, 120, 121, 158, 210
TiO2, 4, 24, 26, 27, 46, 54, 56, 58, 77, 79, 91, 92, 93, 94, 96, 97, 102, 105, 106, 108, 114, 120, 121, 122, 123, 124, 125, 126, 127, 134, 136, 139, 146, 150, 152, 155, 158, 160, 161, 163, 166, 172, 180, 181, 185, 186, 190, 202, 203, 205, 208, 211, 231, 232, 255, 256, 270, 275, 350, 361, 362, 367, 391, 396
titania, 118, 120, 121, 122, 123, 125, 126, 135, 136, 137, 138, 150, 231, 341
Titania, 203
titanium, 33, 76, 107, 121, 123, 139, 145, 155, 158, 180, 190, 202, 203, 204, 205, 215, 255, 391
Titanium, 120, 204, 215, 396
titanium dioxide, 76, 204, 255, 391
Titanium Dioxide, 215, 216, 396
tolerances, 57, 249, 250, 262
tool, 37, 38, 49, 155, 248, 273, 274, 275, 327, 369, 387, 397
tooling, 49, 51, 61, 64, 243, 251, 315, 316, 339, 359, 365
Tooling, 315
toxic, 123, 127, 158
toxicity, 158
Toxicity, 158
tp, 109
TP, 264, 265, 269, 290, 291, 292, 294, 295, 296, 297, 298, 305, 306, 381
transmission, 153, 156, 207, 211, 251, 274, 276, 300, 331, 367, 393, 396
Transmission, 201, 299, 302
transmittance, 56, 81, 82, 83, 84, 85, 87, 90, 91, 93, 94, 96, 97, 109, 120, 123, 127, 129, 132, 135, 136, 137, 138, 140, 142, 143, 145, 151, 153, 199, 206, 250, 254, 256, 259, 264, 269, 270, 271, 280, 283, 286, 289, 290, 291, 294, 296, 299, 300, 301, 305, 306, 319, 320, 326, 329, 338, 339, 341, 343, 345, 346, 347, 348, 355, 359, 368, 374, 378, 381, 382, 386, 387, 392
Transmittance, 84, 121, 190, 192, 193, 198, 393
transmittance compartment, 90
transmittance measurement, 87, 392
transmittance scale, 286, 300
transparent, 91, 135, 137, 140, 143, 151, 152, 153, 154, 194, 210, 212, 215, 393
Transparent, 73, 193, 195, 196, 207, 208, 209, 210, 211, 212
trap, 11, 16, 17, 37, 61
triangle diagram, 147, 150, 151
tribological, 47, 120, 140
Tribological, 188, 214
triode, 32, 212
Triode, 32, 33
triode sputtering, 212
tungsten, 20, 21, 25, 122, 130, 133, 134, 136, 138, 139, 141, 142, 143, 144, 147, 148, 150, 151, 154, 161, 166, 167, 198, 225, 226, 258
Tungsten, 22, 154, 209
tungsten oxide, 122, 151, 154, 198
Tungsten Oxide, 154
tunneling, 27, 115, 116, 135, 210
turning point, 91, 265, 266, 267, 268, 269, 280, 281, 282, 290, 298, 300, 302, 303, 304, 306, 314, 317, 318, 319, 320, 321, 334, 339, 340, 342, 343, 344, 348, 350, 351, 359, 362, 369, 374, 375, 376, 378, 379, 380, 381, 382, 383, 387, 388, 389, 391, 394
Turning point, 291, 302
two-turning-point, 382, 386, 387
U
ultimate pressure, 13, 69
ultraviolet, 84, 120, 121, 132, 133, 142, 148, 191, 193, 202, 203, 209, 277
Ultraviolet, 191, 193, 194, 202, 206, 248, 397
uniformity, 4, 25, 29, 34, 48, 49, 50, 51, 54, 55, 56, 57, 58, 62, 97, 98, 118, 119, 147, 160, 163, 165, 185, 219, 367
Uniformity, 48, 54, 58, 73, 195
V
vacuum gauge, 63
valve, 8, 9, 12, 15, 17, 19, 43, 46, 62, 63, 65, 241
Vanadium, 154
vapor jet, 14
vapor pressure, 1, 2, 11, 12, 128, 134
variation, 46, 50, 126, 127, 137, 171, 192, 316, 334, 350, 392
velocity, 25, 112
viscous flow, 9, 10, 76
Viscous flow, 9
VN, 89, 90, 91
volt, 28, 62, 70, 164, 171, 172, 174, 238, 239
voltage, 25, 26, 29, 30, 32, 34, 41, 42, 45, 46, 47, 60, 63, 65, 74, 75, 76, 117, 119, 126, 127, 154, 160, 161, 162, 163, 164, 165, 166, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 180, 205, 213, 219, 232, 238, 240, 241, 246
voltage control, 46, 160
volts, 20, 22, 25, 40, 118, 119, 160, 161, 162, 163, 164, 165, 166, 168, 170, 171, 180, 188, 219, 238, 241, 246, 273
VW, 88, 89, 90
W
w, 185
W, 73, 74, 75, 77, 78, 79, 89, 90, 154, 155, 190, 191, 192, 193, 194, 195, 196, 197, 198, 200, 201, 203, 204, 205, 206, 207, 208, 209, 210, 211, 212, 213, 214, 215, 216, 248, 391, 392, 393, 395, 396, 397
wall, 14, 31, 56, 59, 65
water vapor, 10, 13, 15, 16, 17, 18, 60, 61, 68, 84, 102, 129, 147, 152, 154, 155
wavenumber, 82, 97, 99
wear, 140, 186, 197
Wear, 74, 205, 206
web, 1, 48, 61, 68, 129, 137, 151, 152, 184
Web, ii, 78, 198, 205
wedge, 84, 86, 87, 310, 311, 312, 333, 389
Wedge, 310, 311
weight, 33, 106, 122, 182, 223, 225, 226, 227, 259, 260
wide, 64, 83, 84, 87, 90, 117, 135, 149, 155, 158, 271, 279, 307, 311, 312, 314, 333, 382, 383, 386, 387, 394
Wide, ii
window, 59, 65, 68, 107, 109, 112, 135, 142, 187, 196, 204, 215, 258, 260, 275, 396
Window, 37, 74, 154, 185, 210
wire, 21, 59, 147, 148, 150, 154, 166, 167, 225, 258, 259, 283
witness, 56, 88, 96, 97, 315, 362
Witness, 315
WO3, 122, 153, 154, 155, 209, 210
X
Xe, 33
xenon, 33
x-ray, 99, 199
X-ray, 124, 131, 203, 210
Y
Y2O3, 137, 150, 158, 192
YbF3, 145
YF3, 107, 137, 200
Ytterbium Fluoride, 145
yttria, 120, 121, 135, 136, 137, 138, 149, 192, 200, 206
Yttria, 137, 142, 192
Yttrium Fluoride, 137
Yttrium Oxide, 137, 192
Z
Zinc Oxide, 142
zinc selenide, 134, 205, 215
Zinc Selenide, 134
zinc sulfide, 191, 204, 316, 359
Zinc Sulfide, 132, 191
zirconia, 120, 121, 135, 136, 137, 138, 192, 206
Zirconium Dioxide, 138, 206
ZnO, 133, 142, 143, 154, 158, 193, 205, 208
ZnS, 22, 48, 52, 58, 83, 112, 114, 132, 133, 134, 143, 158, 187, 191, 204, 215
ZnSe, 48, 58, 83, 112, 134, 137, 158, 187, 191
zone, 45, 56, 103, 104, 105, 107, 137, 199
Zone, 103, 105, 107, 110, 123, 137, 141
ZrO2, 138, 139, 158, 200

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